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Hiden precision mass spectrometers, energy analyzers and Langmuir probes are routinely used in residual gas analysis applications, gas studies from UHV to 30 bar, materials characterization, SIMS and Plasma ion/radical analysis.
With dedicated inlets for TA-MS, molecular beam studies, dissolved gas analysis in liquids/solids, and multiple-stream sampling the Hiden range provides unrivalled performance in applications such as:
- UHV TPD
- PECVD
- RIE
- TPR/TPO/TPD and MBE
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