Residual Gas Analyzers - RGA

• RGA Series for Vacuum Diagnostics and Leak Detection.
• HMT High Pressure RGA for Vacuum Diagnostics and Process Monitoring.
• HPR-30 Differentially Pumped RGA for Vacuum, Process Monitoring and Leak Detection.
• HPR-80 Quantitative Vacuum Process Gas Analyzer Reactive / Corrosive Species.
   

Triple Filter Quadrupole Mass Spectrometers

• 3F Series Triple Filter RGA Systems.
• PIC Mass Spectrometers with Pulse Ion Counting Detection.
• EPIC Mass Spectrometers with Pulse Ion Counting Detection and Pole Bias Control.
• Quadrupole Mass Spectrometer Components.

Process Control Systems

• XBS - MBE Deposition Rate Monitoring / Control System.
• IMP - Ion Beam Etch End Point Detector.

Laboratory Gas Analyzers

• QIC-20 Laboratory Style Gas/Vapor Analyzer.
• Hydra Multi-Stream Gas/Vapor Analyzer.

Research Gas Analyzers

• HPR 20 QIC Research Grade System for Continuous Sampling Gas/Vapor Analysis.
• HPR 40 Dissolved Species Analyzer.
• HPR 50 CVD Diamond Process Analyzer.
• HPR 60 Molecular Beam Sampling Neutrals, Ions and Radicals Measurement System.
• HPR 70 Batch Sample Inlet Gas Analyzer.
• HPR 90 Sealed Package Gas Analyzer with Integal Package Cracker.
• QIC-100 1000 amu Mass Range System for Continuous Sampling Gas / Vapor Analysis.

Gas Sampling Valves

• Proteus Multi-Stream Valve 40 and 80 Way Versions.
• 8 way Multi-Stream Gas Switching Manifold - Heated and Unheated Versions.

Catalyst Characterization

• CATLAB an Integrated Microreactor and Mass Spectrometer System for Catalyst Characterization and In-Situ Screening of Catalyst Activity.

Surface Science

• EQS SIMS-Secondary ion Mass Spectrometer ‘Bolt-On’ probes.
• IG Series Ion and Ion/FAB Guns.
• SIMS Workstation - a complete SIMS Analysis Facility.
• IDP Ion and Neutrals Analyzer for Electron and Photon Induced Desorption Studies.

Plasma Characterization

• EQP Mass / 45 Sector Field Energy Analyzer for Neutrals, Radicals and Ion Analysis.
• PSM Series, In-Line Plasma Analyzers for Neutrals, Radicals and Ion Analysis.
• ESPion Advanced Langmuir Probes for Electrical Plasma Characterization.
• HPR-100 Plasma Workstation, a complete Plasma Reactor System with Integral Plasma Diagnostics.