Plasma Analysis
A wide range of industrial processes use electrical plasmas and new applications are developing rapidly. In the microelecronics industry the demands of higher yields and shrinking device geometries mean that process reproducibility and understanding is vital.
Hiden plasma probes measure some of the key plasma parameters and provide detailed information relating to plasma reaction chemistry.
Hiden
Plasma Analysis Products include:
EQP: Mass and energy analyzer for plasma diagnostics.
ESPION: Advanced langmuir probe for plasma diagnostics.
HPR-30: Process gas analyzer.
PSM Series: Advanced Plasma Sampling Mass Spectrometers.
click here for more information on Hiden's plasma analysis products