HPR-50 Gas Analyser for Diamond CVD

Sub ppm analysis of all components present or evolved during your diamond growth process.

• CVD
• PECVD
• Process control / On-line real time monitoring
• Contamination studies
• By-products analysis
• For improved reproducibility / product quality

 

The HPR-50 jet separator mass spectrometer, a dedicated, custom-designed gas analysis system for monitoring of diamond growth processes, featuring:

 

• Ultra-Fast response Jet separator inlet for molecular beam sampling.
• High Sensitivity (to 5 ppb), Mass range options to 2500 amu.
• Heated Inert inlet for characterisation of reactive intermediates / products.
• Liquid N₂ cryopanels for optimum vacuum / minimal spectral interference.
• Penning Gauge and interlocks to provide over pressure protection.
• 20 - 400 Torr sampling pressure operation.
• Stability (less than ±0.5% height variation over 24 h).
• MASsoft control via RS232, RS485 or Ethernet LAN.
• Soft Ionisation for the analysis of complex organics / appearance MS studies.

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