The PSM is a differentially pumped mass spectrometer
for the analysis of secondary ions and neutrals from plasma process,
featuring:
- Differentially pumped manifold with mounting flange to process
chamber.
- High sensitivity / stability triple filter quadrupole, mass
range options to 2500amu.
- Pulse ion counting detector with 7 decade dynamic range.
- Energy analysis option by pole bias scanning ±100eV
standard, 1000eV option.
- Ion extraction / exclusion optics with tuneable integral ioniser
for Appearance Potential MS with electron attachment option.
- Penning gauge and interlocks to provide over pressure protection.
- Signal gating to 1ms for pulsed plasmas or energy & mass
distributions vs time.
- Analysis of neutrals and radicals as standard, +ve / -ve ion
analysis option.
- Mu-Metal, Radio-metal shielding options, high pressure operation
options.
- MASsoft control via RS232, RS485 or Ethernet LAN.
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