Hiden ESPion – Advanced Langmuir Probe for Plasma Diagnostics

The most advanced and reliable Langmuir Probe available for

• Etching / Deposition / Cleaning Plasmas
• Pulsed plasma operation.
• Ion collection (N_i & G_i)
• Electron retardation (T_e & EEDF)
• Electron collection (N_e).
• Plasma Potential.
• Debye Length, floating potential

 

The ESPion advanced Langmuir probe for rapid, reliable and accurate plasma diagnostics for industry and academia, featuring:

 

• 15 scans per sec acquisition rate with D-O-E interface for auto, semi or manual analyses.
• Hiden pioneers in passive RF compensation, ESPion has the highest blocking impedance of any commercially available unit (4.25Mohm at 13.56 MHz cf. 100kohm).
• Gas cooled multi-inductor chain for high temperature plasma operation is user replaceable for tuning to other frequencies.
• reference probe compensates for low frequency effects e.g. shift in the plasma potential (e.g. anodised chamber walls) or noise (e.g. power supply).
• ESPion the fastest pulsed plasma specifications of any commercial probe, ESPsoft contains all necessary gating circuitry as standard.
• 300, 600 or 915mm auto linear drive options, interlocked isolation valve, 90° probes, combined linear – rotary drives options available.
• Self-cleaning cycle to limit probe tip contamination.
• ESPsoft control via RS232, RS485 or Ethernet LAN.

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